Semiconductor parts refer to the parts that meet the semiconductor equipment and technical requirements in terms of materials, structure, process, quality and accuracy, reliability and stability, such as O-Ring seal ring, EFEM (transmission module), RF Gen RF power supply, ESC electrostatic sucker, Si silicon ring and other structural parts, Pump vacuum pump, MFC gas flowmeter, precision bearing, ShowerHead gas sprinkler head, etc.

Semiconductor equipment is composed of thousands of parts. The performance, quality and accuracy of the parts directly determine the reliability and stability of the equipment. It is also a key basic element for China's semiconductor manufacturing capacity to leap to the high-end. Semiconductor parts are the key components of semiconductor equipment. At present, there is no standard for the classification of semiconductor parts in the industry. There are mainly the following classification methods.

According to the internal process of typical integrated circuit equipment cavity, parts can be divided into five categories: power supply and RF control, gas transmission, vacuum control, temperature control and transmission device. Power supply and RF control include RF generator and matcher, DC/AC power supply, etc. Gas transportation mainly includes flow controller, pneumatic parts, gas filter, etc. Vacuum control includes various vacuum pumps such as dry pumps/cold pumps/molecular pumps, control valves/pendulum valves and other valves, pressure gauges and O-Ring seals. The temperature control category includes heating disk/electrostatic sucker, heat exchanger and lifting components. Conveyors include mechanical arms, EFEM, bearings, precision rails, stepping motors, etc.

According to the service objects of semiconductor parts, semiconductor core parts can be divided into two types, namely precision machining parts and general outsourcing parts. Precision machining parts are usually designed by the engineers of each semiconductor equipment company, and then outsourced for processing. They will only be used on the equipment of their own company, such as process chambers, transmission chambers, etc. It is relatively easy to localize, and generally have high requirements for surface treatment, precision machining and other processes and technologies; General purchased parts are general parts that have been verified for a long time and widely recognized by many equipment manufacturers and manufacturers. They are more standardized, and will be used by different equipment companies, and will also be used as spare parts and consumables for production lines, such as silicon structural parts, O-Ring seals, valves, gauges, pumps, face plates, gas shower heads, etc. Because these parts have strong universality and consistency, And it needs to be certified by equipment and manufacturing line, so localization is difficult.

According to the main materials and functions of semiconductor parts, they can be divided into 12 categories, including silicon/silicon carbide parts, quartz parts, ceramic parts, metal parts, graphite parts, plastic parts, vacuum parts, seals, filter parts, moving parts, electric control parts and other parts.

The performance of ThermoStream TS-760 high and low temperature impact airflow meter developed by Intercooling Low Temperature Technology has reached a very high standard. It can be applied to semiconductor characteristic analysis, high and low temperature temperature change test, temperature shock test, failure analysis and other reliability tests. The temperature conversion is from - 55 ℃ to+125 ℃ for about 10 seconds, with a wider temperature range of - 70 ℃ to+225 ℃; Through long-term multi working condition verification, it can meet the requirements of more production environment and engineering environment. TS-760 is pure mechanical refrigeration, without liquid nitrogen or any other consumable refrigerant.