What are the methods for integrating lasers into chips?
2024-05-09 09:20:09

Photonic Integrated Circuit (PIC) is a circuit that utilizes the principles of photonics to achieve efficient information transmission and processing under conditions of high speed, large bandwidth, and low energy consumption. This type of circuit integrates optical and electronic devices on the same substrate, using silicon manufacturing technology to manufacture most integrated circuits.
There are currently four methods to achieve tighter integration between laser and silicon: flip chip processing, micro transfer printing, wafer bonding, and single-chip integration.
1. Inverted chip integration
This is a chip packaging technology that directly integrates lasers onto silicon wafers. The principle is that the electrical connection device of the chip is located at the top, and the interconnection on the top layer ends at the metal solder pad. This technology relies on solder balls attached to solder pads, which are then flipped over to align the solder with the corresponding solder pads on the chip package and melt the solder, thereby connecting the chip to the package. Specifically, for the integration of lasers and silicon photonic chips, edge emitting lasers are fully processed on the wafer, then cut into individual chips and tested by the supplier. Afterwards, a high-precision flip chip process is used to bond a single laser chip onto the target silicon photon wafer. The key to this method is to ensure that the output of the laser is consistent with the input of the silicon photon chip during edge emission.
2. Micro transfer printing
Micro transfer printing uses adhesive and can even rely solely on molecular bonding, which relies on van der Waals forces between two planes to fix the laser in place. Micro transfer printing eliminates some alignment difficulties of docking coupling. The printing mold aligns the laser with the waveguide structure on the silicon photonic wafer and bonds them there, with greater alignment tolerance allowing the technology to transmit thousands of devices at once, accelerating the assembly process.
3. Wafer bonding
The III-V silicon wafer bonding technology involves bonding blank chips (or even small chips) of III-V semiconductors onto the silicon wafer, enabling the construction of the required laser equipment in areas where corresponding silicon waveguides already exist. After bonding with silicon wafers, standard photolithography and wafer level processes can be used to manufacture laser diodes in the epitaxial layer aligned with the underlying silicon waveguide. Then etch off any unwanted III-V materials.
The disadvantage of wafer bonding is that it requires a significant investment to establish a production line that can use tools for manufacturing 200mm or 300mm silicon wafers to handle the III-V process step millimeter diameter.
4. Single chip integration
Eliminating any need for bonding or alignment, growing III-V family semiconductors directly on silicon will reduce the amount of wasted III-V materials. Each III-V layer grown on silicon generates strain. After adding only a few nanometers of III-V thin film, defects will appear in the crystal, releasing accumulated strain. These defects include open crystal bond lines and local crystal distortions, both of which can significantly reduce the performance of optoelectronic devices. To prevent these defects from damaging the laser, it usually involves laying a layer of III-V material several micrometers thick, forming a huge buffer zone between the mismatch defect below and the strain free area above, where the laser equipment can be manufactured. This is currently the only technology that can truly integrate lasers on a single chip.
Each method has its specific application scenarios and advantages and disadvantages, and the choice of method depends on factors such as specific application requirements, integration difficulty, cost, and performance requirements. In practical operation, it is also necessary to consider issues such as the coupling efficiency between the laser and the chip, thermal management, and the feasibility of packaging and testing.

 

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