Product details
The TC-A series is an air-cooled high and low temperature wafer chuck system with a temperature range of -60 ℃ to+200 ℃ (optional+300 ℃), mainly composed of air-cooled chucks and temperature controllers. The system has a wide temperature control range, compact cooling kit, pure air cooling, high temperature accuracy and stability control, and is widely used for the analysis of key parameters of variable temperature electrical performance of semiconductor devices or wafers of various sizes (4 ", 6", 8 "12"), such as power device modeling testing, wafer reliability evaluation, production type variable temperature detection, variable temperature photoelectric testing, RF variable temperature testing, etc. Meanwhile, we use high-quality materials and manufacturing processes to ensure the high reliability and long lifespan of the system. We can provide corresponding upgrade solutions for various probe stations and different customer testing needs.
Applicable brands: American Cascade, Electroglass, MPI, EVERBEING Wentworth, Hprobe, Micronics Japan, KeyFactor Systems, MicroXact, SemiProbe, Micromanipulator, manual/semi-automatic probe stations from domestic brands.
Upgrade content:
1. CHUCK installation and localization replacement;
2. Customization of micro chambers for high and low temperature frost prevention;
3. CHUCK flatness adjustment;
4. Levelness debugging based on probe platform;
5. Software compatibility debugging
Service standards
Speed: respond within 1 hour and provide implementation plan within 24 hours.
Major: many engineers have been with ThermoChuck/ThermoChuck for more than 10 years.
Maintenance: standard service of the original factory.
Material: original brand material.
Support: provide exchange maintenance.
Information: update and backup equipment files, and be the housekeeper of customer equipment.